R USSIAN A CADEMY OF S CIENCES, SIBERIAN BRANCH. K UTATELADZE I NSTITUTE OF T HERMOPHYSICS. N UMERICAL S IMULATION OF N ONEQUILIBRIUM F LOWS BY G AS J.

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R USSIAN A CADEMY OF S CIENCES, SIBERIAN BRANCH. K UTATELADZE I NSTITUTE OF T HERMOPHYSICS. N UMERICAL S IMULATION OF N ONEQUILIBRIUM F LOWS BY G AS J ET P OLYMER F ILM D EPOSITION. A LEXEY К. R EBROV R OMAN V. M ALTSEV Russia, Novosibirsk 2007

T HE OPENING OF HYPERHEAT EFFECTS. N EW SOURCES FOR GASDYNAMIC FILM DEPOSITION.

Energy distribution function of C 2 F 4 molecules colliding with the substrate surface.