R USSIAN A CADEMY OF S CIENCES, SIBERIAN BRANCH. K UTATELADZE I NSTITUTE OF T HERMOPHYSICS. N UMERICAL S IMULATION OF N ONEQUILIBRIUM F LOWS BY G AS J ET P OLYMER F ILM D EPOSITION. A LEXEY К. R EBROV R OMAN V. M ALTSEV Russia, Novosibirsk 2007
T HE OPENING OF HYPERHEAT EFFECTS. N EW SOURCES FOR GASDYNAMIC FILM DEPOSITION.
Energy distribution function of C 2 F 4 molecules colliding with the substrate surface.